ISSN print edition: 0366-6352
ISSN electronic edition: 1336-9075
Registr. No.: MK SR 9/7

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Mechanical and optical properties of SiO2 thin films deposited on glass

Lukáš Šimurka, Radim Čtvrtlík, Jan Tomaštík, Gence Bektaş, Jan Svoboda, and Klaus Bange

ŞİŞECAM Science and Technology Center, Gebze, Turkey



Abstract: The optical and mechanical properties of amorphous SiO2 films deposited on soda-lime silicate float glass by reactive RF magnetron sputtering at room temperature were investigated in dependence of the process pressure. The densities of the films are strongly influenced by the process pressure and vary between 2.38 and 1.91 g cm−3 as the pressure changes from 0.27 to 1.33 Pa. The refractive indices of the films shift between 1.52 and 1.37, while the residual compressive stresses in the deposited films vary in the range from 440 to 1 MPa. Hardness and reduced elastic modulus values follow the same trend and decline with the increase of process pressure from 8.5 to 2.2 GPa and from 73.7 to 30.9 GPa, respectively. The abrasive wear resistance decreases with the density of the films.

Keywords: SiO2 films ; Glass ; Mechanical properties ; Refractive index ; Residual stress 

Full paper is available at

DOI: 10.1007/s11696-018-0420-z


Chemical Papers 72 (9) 2143–2151 (2018)

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