ISSN print edition: 0366-6352
ISSN electronic edition: 1336-9075
Registr. No.: MK SR 9/7

Published monthly
 

Loss of phosphorus from the indium-indium phosphide system during annealing

R. Srnánek and P. Hábovčík

Lehrstuhl für Mikroelektronik der Slowakischen Technischen Hochschule, 880 19 Bratislava

 

Abstract: The paper deals with the losses of phosphorus from the system In — I n P by annealing; the content of phosphorus in the samples corresponded to 3.2 — 8.0 mole % InP. The phosphorus losses were studied with respect to the annealing temperature (627 —730°C), the annealing duration (10 — 240 minutes) and the flow rate of hydrogen (1.3 — 7.3 l/min). The applicability of the determined dependences to the preparation of epitaxial layers of InP from the liquid phase is discussed.

Full paper in Portable Document Format: 294a484.pdf (in German)

 

Chemical Papers 29 (4) 484–488 (1975)

Tuesday, April 16, 2024

IMPACT FACTOR 2021
2.146
SCImago Journal Rank 2021
0.365
SEARCH
Advanced
VOLUMES
European Symposium on Analytical Spectrometry ESAS 2022
© 2024 Chemical Papers